Program Chair:
Sean Barry (Carleton University, Canada)
Program Co-Chair:
Scott Clendenning (Intel, USA)
ALD Program Committee:
- Noureddine Adjeroud (LIST, Luxembourg)
- Sumit Agarwal (Colorado School of Mines, USA)
- Sang Hoon Ahn (Samsung, South Korea)
- Parag Banerjee (University of Central Florida, USA)
- Sean Barry (Carleton University, Canada)
- Stacey Bent (Stanford University, USA)
- Haripin Chandra (Versum/EMD, USA)
- Rong Chen (Huazhong University of Science & Technology, China)
- Robert Clark (TEL America, USA)
- Scott Clendenning (Intel Components Research, USA)
- John F. Conley, Jr. (Oregon State University, USA)
- Arrelaine Dameron (Forge Nano, USA)
- Neil Dasgupta (University of Michigan Ann Arbor, USA)
- Annelies Delabie (imec, Belgium)
- Jolien Dendooven (Ghent University, Belgium)
- Christophe Detavernier (Ghent University, Belgium)
- Anjana Devi (Ruhr-University Bochum, Germany)
- Charles Dezelah (ASM Microchemistry, Finland)
- Shi-Jin Ding (Fudan University, China)
- Christian Dussarrat (Air Liquide, France)
- Yair Ein-Eli (Technion, Israel)
- Jeffrey Elam (Argonne National Laboratory, USA)
- Simon Elliott (Schrödinger, Ireland)
- Steven George (University of Colorado Boulder, USA)
- Dennis Hausmann (Lam, USA)
- Cheol Seong Hwang (Seoul National University, South Korea)
- Hyungjun Kim (Yonsei University, South Korea)
- Jiyoung Kim (University of Texas at Dallas, USA)
- Mato Knez (Nanogune, Spain)
- Harm Knoops (Oxford Instruments, UK)
- Se-Hun Kwon Pusan (National University, South Korea)
- Adrien LaVoie (Air Liquide, USA)
- Han-Bo-Ram Lee (Incheon National University, South Korea)
- Sang In Lee (Synos Foundation, USA)
- Sang Young Lee (Intel, USA)
- Markku Leskelä (University of Helsinki, Finland)
- Wei-Min Li (Lead Micro, China)
- HanJin Lim (Samsung, South Korea)
- Adrie Mackus (Eindhoven University of Technology, Netherlands)
- Mike McSwiney (Intel Global Supply Chain, USA)
- Jin-Seong Park (Hanyang University, South Korea)
- Henrik Pedersen (Linköping University, Sweden)
- Tero Pilvi (Picosun, Finland)
- Paul Poodt (TNO/Holst Center, Netherlands)
- Viljami Pore (ASM Microchemistry, Finland)
- Matti Putkonen (University of Helsinki, Finland)
- Riikka Puurunen (Aalto University, Finland)
- Joel Molina Reyes (Instituto Nacional de Astrofísica, Óptica y Electrónica (INAOE), Mexico)
- Mikko Ritala (University of Helsinki, Finland)
- Seung Wook Ryu (SK Hynix, South Korea)
- Nathanaelle Schneider (CNRS Photovoltaics Unit, France)
- Uwe Schroeder (Namlab, Germany)
- Nicholas Strandwitz (Lehigh University, USA)
- Ganesh Sundaram (Veeco, USA)
- Adriana Szeghalmi (Fraunhofer Institute of Applied Optics, Germany)
- Christophe Vallee (LETI-LTM, France)
- Ruud Van Ommen (Delft University of Science and Technology, Netherlands)
- Virginia Wheeler (U.S. Naval Research Laboratory, USA)
- Charles Winter (Wayne State University, USA)
- Jinjuan Xiang (Institute of Microelectronics, Chinese Academy of Sciences, China)
- Angel Yanguas-Gil (Argonne National Laboratory, USA)
ALD International Advisory Committee:
- Annelies Delabie (imec, Belgium)
- Anjana Devi (Ruhr-University Bochum, Germany)
- Jeffrey Elam (Argonne National Lab, USA)
- Steven George (University of Colorado at Boulder, USA)
- Cheol Seong Hwang (Seoul National University, South Korea)
- Hyeongtag Jeon (Hanyang University, South Korea)
- Erwin Kessels (Eindhoven University of Technology, The Netherlands)
- Hyungjun Kim (Yonsei University, South Korea)
- Sang In Lee (Synos Foundation, USA)
- Markku Leskelä (University of Helsinki, Finland)
- Gregory N. Parsons (North Carolina State University, USA)
- Viljami Pore (ASM, Finland)
ALD Steering Committee:
- Steven George (University of Colorado at Boulder, USA)
- Erwin Kessels (University of Eindhoven, The Netherlands)
- Hyungjun Kim (Yonsei University, South Korea)
- Gregory N. Parsons (North Carolina State University, USA)
ALE Program Chairs:
Program Chair:
Jane Chang (University of California, Los Angeles, USA)
Program Co-Chair:
Thorsten Lill (Lam Research, USA)
ALE Program Committee:
- Eric Joseph (IBM, USA)
- Yun Han (IBM, USA)
- Keren Kanarik (Lam Research, USA)
- Thorsten Lill (Lam Research, USA)
- Ankur Agarwal (KLA, USA)
- Craig Huffman (Micron USA)
- Venkat Pallem (Air Liquide, USA)
- Yohei Ishii (Hitachi High Technologies America, USA)
- Angelique Raley (TEL US, USA)
- Harm Knoops (Oxford Instruments, Netherlands)
- Jean-Francois de Marneffe (imec, Belgium)
- Nicolas Possémé (Leti, France)
- Tetsuya Tatsumi (Sony, Japan)
- Wei Tian (TSMC, USA)
- David Boris (NRL, USA)
- Jeff Elam (Argonne National Laboratory, USA)
- Dmitry Suyatin (Lund University, Sweden)
- Erwin Kessels (Eindhoven University of Technology, Netherlands)
- Fred Roozeboom (TNO, Netherlands)
- Bert Ellingboe (Dublin City University, Ireland)
- Gottlieb Oehrlein (University of Maryland, USA)
- Jane Chang (UCLA, USA)
- Steven George (University of Colorado, USA)
- Sumit Agarwal (Colorado School of Mines, USA)
- Geun Young Yeom (SKKU, Korea)
- Heeyeop Chae (SKKU, Korea)
- Satoshi Hamaguchi (Osaka University, Japan)
ALE Steering Committee:
- Craig Huffman (Micron, USA)
- Eric Joseph (IBM, USA)
- Keren Kanarik (Lam Research, USA)
- Steve George (University of Colorado at Boulder, USA)